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De-Embedding Coupler Loss with Reference Structures

Procedure for separating fiber-to-chip coupler loss from device loss using back-to-back reference structures: loopback measurement, per-coupler spectra, spectral subtraction, alignment repeatability protocol, and Fabry-Perot ripple diagnosis, with worked numbers.

Published September 5, 20264 min read

Scope

This article describes the procedure for extracting the insertion loss of an on-chip device from fiber-coupled measurements, by measuring and removing the fiber-to-chip couplers with a back-to-back reference structure. It covers the loopback measurement itself, per-coupler loss spectra, spectral subtraction, the alignment-repeatability protocol that sets the error floor, and the diagnosis of Fabry-Perot ripple. Grating-coupler access is assumed; the same logic applies to edge couplers with minor changes noted at the end. Alignment technique itself is covered in first light on a grating coupler.

The problem

Every fiber-coupled measurement contains two couplers and one device, summed in dB:

Tmeas(λ)=ILGC,in(λ)ILDUT(λ)ILGC,out(λ)+Tref,fibers(λ).T_\text{meas}(\lambda) = -\mathrm{IL}_\text{GC,in}(\lambda) - \mathrm{IL}_\text{DUT}(\lambda) - \mathrm{IL}_\text{GC,out}(\lambda) + T_\text{ref,fibers}(\lambda).

A grating coupler contributes typically 3 – 6 dB each with a roughly Gaussian passband 30 – 40 nm wide (3 dB, full width). Both numbers dwarf many devices under test: measure a 0.3 dB MMI through two 4.8 dB couplers and the thing you care about is 3% of the raw loss. Worse, the couplers' curvature bends every measured spectrum, turning flat devices into apparent 30 nm bandpass filters. De-embedding fixes both.

Procedure

1. Calibrate the fiber path. Connect the input fiber directly to the output fiber (or through the same mating sleeve you will use all day) and record Tref,fibers(λ)T_\text{ref,fibers}(\lambda). Everything after this step is referenced to the chip's fiber tips.

2. Measure the loopback. Land on the back-to-back structure, two nominally identical couplers joined by a short waveguide, peak the alignment at the coupler's center wavelength, and sweep. The per-coupler loss spectrum is half the loopback loss:

ILGC(λ)=12[Tref,fibers(λ)Tloopback(λ)].\mathrm{IL}_\text{GC}(\lambda) = \tfrac{1}{2}\left[T_\text{ref,fibers}(\lambda) - T_\text{loopback}(\lambda)\right].

The halving assumes the two couplers are identical, which on one die is usually good to a few tenths of a dB; the error budget section below says when it isn't.

3. Quantify your landing repeatability. Lift the fibers, re-land, re-peak, re-sweep; repeat five times. The standard deviation of peak transmission across landings, commonly 0.05 – 0.2 dB per facet with good stages, is the floor under every de-embedded number you will produce today. Report it with your results. A loss map whose color scale is finer than its landing scatter is decoration, not data.

4. Measure the device path and subtract. Sweep the device structure under identical conditions (same polarization state, same temperature, same sweep settings), then

ILDUT(λ)=Tref,fibers(λ)Tmeas(λ)2ILGC(λ).\mathrm{IL}_\text{DUT}(\lambda) = T_\text{ref,fibers}(\lambda) - T_\text{meas}(\lambda) - 2\,\mathrm{IL}_\text{GC}(\lambda).

Subtraction in dB is division in linear power, so this only works on a common wavelength grid; interpolate the reference onto the device sweep's grid, never the reverse if the device has sharp features.

5. Fit, don't read, the coupler curve. Near its peak a grating coupler's transmission in dB is well modeled by a parabola, T(λ)T0a(λλ0)2T(\lambda) \approx T_0 - a(\lambda - \lambda_0)^2. Fitting the parabola over the points within a few dB of the peak gives the center wavelength λ0\lambda_0, per-coupler peak loss, and the 1 dB and 3 dB bandwidths (BWXdB=2X/a\mathrm{BW}_{X\,\text{dB}} = 2\sqrt{X/a}) far more repeatably than reading the maximum sample, which rides on ripple and noise. The Grating Coupler Spectrum Fitter does this on a pasted scan, including the ripple analysis below.

Reading the ripple

Periodic fringes on the spectrum are a parasitic Fabry-Perot cavity, and their period tells you where it is:

Δλ  =  λ22ngL.\Delta\lambda \;=\; \frac{\lambda^2}{2 n_g L} .

Worked example: a loopback scan peaks at 9.6-9.6 dB at 1547 nm (so 4.8 dB per coupler), with 0.4 dB peak-to-peak ripple of period 0.32 nm. With ng=4.2n_g = 4.2, the implied cavity is L=λ2/(2ngΔλ)=15472/(2×4.2×0.32)0.89mmL = \lambda^2/(2 n_g \Delta\lambda) = 1547^2/(2 \times 4.2 \times 0.32) \approx 0.89\,\text{mm}, matching the coupler-to-coupler waveguide length on the die: the ripple is coupler back-reflection, not the laser. The fringe contrast bounds the reflectance: 0.4 dB peak-to-peak corresponds to an amplitude ratio ρ0.023\rho \approx 0.023 between the circulating and direct fields, i.e. about 33-33 dB of round-trip reflection product. If the period had instead implied several millimeters, the suspects would be the chip facets.

Error budget

TermTypical sizeControl
Landing repeatability0.05 – 0.2 dB per facetMeasure it (step 3); average landings
Coupler identicality, same die0.1 – 0.3 dBLoopback adjacent to DUT; fit both
Coupler identicality, across wafer0.5 dB and 2 – 5 nm of λ₀ shiftOne loopback per reticle
Polarization driftup to several dB if unmanagedPolarization controller; re-peak before each sweep
Temperature∼0.07 nm/K spectral shift on SiSame-session measurements; note the chuck setpoint
Fabry-Perot ripple0.1 – 0.5 dB ppFit through it; angle-polish or apodize couplers
Detector nonlinearity0.05 – 0.2 dB over 40 dBStay in the detector's linear range

Edge couplers

The same procedure applies with two changes: the reference is a straight-through waveguide between two facets rather than a loopback loop, and the passband is broad and flat, so the "curvature" correction matters less but the facet Fabry-Perot matters more (the facets are better mirrors than gratings). Length-dependent structures then separate facet loss from propagation loss exactly as in the cutback method.

Handoff

Paste a loopback scan (wavelength, transmission) into the Grating Coupler Spectrum Fitter: it fits the parabola, reports center wavelength, per-coupler loss, 1 dB and 3 dB bandwidths, and analyzes the residual ripple, period, amplitude, and the implied parasitic cavity length. Background: the de-embedding and grating coupler glossary entries.

References: Chrostowski & Hochberg, Silicon Photonics Design (2015), Ch. 9 on test structures and wafer-scale metrology.