Photonica

Vertical-cavity surface-emitting laser (VCSEL)

A semiconductor laser with its optical cavity oriented perpendicular to the wafer surface, emitting through the top or bottom of the chip. Dominant short-wavelength datacom source.

A VCSEL has its laser cavity oriented vertically through the epitaxial layers, with light emitted from the top (or bottom) surface rather than from a cleaved edge. The cavity is short (1\sim 1 μm, \sim one wavelength) and bounded by two high-reflectivity distributed Bragg reflectors (DBR mirror stacks) above and below the active region.

Standard structure:

LayerFunction
Top DBR (p-type)20 – 30 pair AlAs/GaAs (or similar) at R99.5R \gtrsim 99.5%
Oxide apertureSelective oxidation of one layer to provide current and optical confinement
Active regionOne to several quantum wells
Bottom DBR (n-type)30 – 40 pair AlAs/GaAs at R99.9R \gtrsim 99.9%
SubstrateGaAs (most VCSELs) or InP (1300+ nm long-wavelength VCSELs)

The high mirror reflectivities are required because the short cavity length gives low single-pass gain — typical mirror loss is αmln(1/R)/Lcav\alpha_m \approx \ln(1/R)/L_\text{cav} which must be balanced by the gain–length product.

Performance characteristics:

ParameterMultimode 850 nmSingle-mode 1310/1550 nm
Threshold current0.3 – 1 mA1 – 5 mA
Max single-ended output2 – 5 mW1 – 3 mW
Modulation bandwidth15 – 30 GHz10 – 20 GHz
Beam divergence (FWHM)15° – 25°8° – 15°
RIN130-130 to 140-140 dB/Hz140-140 to 150-150 dB/Hz
Linewidth\sim 50 – 100 MHz\sim 5 – 50 MHz

VCSELs dominate the short-reach datacom market: 850 nm multimode VCSELs over OM3/OM4 fiber drive 10/25/100/400 GbE switch interconnects, optical mice, and 3D depth sensors. Long-wavelength VCSELs (1310/1550 nm) compete with edge-emitting DFB lasers in some access-network and silicon-photonic co-packaged optics applications.

Distinguishing features vs edge-emitting lasers:

  • Circular output beam (vs elliptical) — easier fiber coupling
  • Lower threshold current — direct modulation at very low drive
  • On-wafer testing possible (no cleaving)
  • Easily packaged into 2D arrays for parallel optical links
  • Limited output power vs edge emitters
  • Limited yields at long wavelengths (1310/1550 nm) due to difficulty growing matched DBRs on InP